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Aggressive Gas Mass Flow Meters and Controllers

Alicat MS/MCS/MCRS Series 316L aggressive gas compatible mass flow meters and controllers

Alicat Scientific has recently introduced it's MS, MCS, MCRS line of 316L aggresive gas compatible mass flow controllers. This line of mass flow meters and mass flow controllers retain the same functionality as well as fit and finish of the standard line of Alicat mass flow meters and controllers.

This line of meters and controllers is built from 316L and uses encapsulated 316L sensors in the flow path. A variety of sealing materials are available, including FFKM, EPDM, Viton, Buna-n, etc, depending upon your application and needs.

Contact Alicat if your application or process might benefit from using an MS, MCS or MCRS mass flow instrument or if you have questions about this series of device.

 

Features and Benefits of MS/MCS series mass flow devices

Mass Flow Controller DisplayMS, MCS, MCRS aggressive gas mass flow meters and controllers share all of the same features and benefits as their M, MC & MCR series counterparts.
 

Installed Gases for MS/MCS series mass flow devices

Inert gas calibrations on MS/MCS/MCRS mass flow devices:
    • Air
    • Argon
    • Methane
    • Carbon Monoxide
    • Carbon Dioxide
    • Ethane
    • Hydrogen
    • Helium
    • Nitrogen
    • Nitrous Oxide
    • Neon
    • Oxygen
    • Propane
    • Butane
    • Acetylene
    • Ethylene
    • Iso-Butane
    • Krypton
    • Xenon
    • Sulfur Hexafluoride
    • 75% Argon + 25% C02
    • 90% Argon + 10% C02
    • 92% Argon + 8% C02
    • 98% Argon + 2% C02
    • 75% Argon + 25% Helium
    • 75% Helium + 25% Argon
    • 75% CO2 + 25% Argon
    • Helistar® A1025
    • Stargon® CS
    • 95% Argon + 5% CH4

Additional corrosive/aggressive gas calibrations included on Alicat MS series mass flow meter gas select list:
    • Nitric Oxide to 100%
    • Nitrogen Triflouride to 100%
    • Ammonia to 100%
    • Chlorine to 100%
    • Hydrogen Sulfide to 100%
    • Sulfur Dioxide to 100%
    • Propylene to 100%
    • Nitrogen Dioxide to 0.5% in an inert carrier
    • Refrigerant gases to 100%

Additional corrosive/aggressive gas calibrations included on Alicat MCS/MCRS series mass flow controller gas select list:
    • Nitric Oxide to 100%
    • Nitrogen Triflouride to 100%
    • Ammonia to 100%
    • Hydrogen Sulfide to 100% (22C and under)
    • Propylene to 100%
    • Nitrogen Dioxide to 0.5% in an inert carrier
    • Refrigerant gases to 100%
    • Other gases to 1000PPM in an inert carrier
 

Aggressive Gas Mass Flow Meter and Controller Literature

DocumentsMS Meter Operating Manual

MS Series Mass Flow Meter Product Specification
0.5SCCM to 50SCCM Full Scale
50+ SCCM to 20SLPM Full Scale
20+ SLPM to 250SLPM Full Scale
250+ SLPM to 2000SLPM Full Scale

MS Series Mass Flow Meter Mechanical Drawings
0.5SCCM to 50SCCM Full Scale
50+ SCCM to 20SLPM Full Scale
20+ SLPM to 100SLPM Full Scale
100+ SLPM to 250SLPM Full Scale
250+ SLPM to 1500SLPM Full Scale
1500+ SLPM to 2000SLPM Full Scale

MCS Controller Operating Manual

MCS/MCRS 316L Mass Flow Controller Product Specification
MCS/MCRS Series mass flow controllers

MCS/MCRS 316L Mass Flow Controller Mechanical Drawing
MCS/MCRS Series mass flow controllers
 
Accessories 
Accessories
Alicat Scientific provides a range of hardware and software accessories to accompany our product. These accessories can be added to an order to create an “out of the box” ready to use laboratory package, or to minimize the additional components required for an integrated application.
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HELP 
Are you not sure if an Alicat liquid flow controller is right for your application, or which series instrument to use? Complete and submit an application assistance form and an Alicat Scientific representative will contact you regarding the best course of action. Or, contact Alicat to speak with an Alicat representative regarding your process and how Alicat can help.
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